ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; LEE, Hyo-jung; KIM, Hye-mi; LEE, Soo-yong; PARK, Kyoung-jin; LEE, Su-hyun; AHN, Hee-choon; KIM, Nam-kyun; KU, Jong-seok; KWON, Hyuck-joo; LEE, Kyung-joo; KIM, Bong-ok Patent: WO2013/32297 A1, 2013 ;