ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; AHN, Hee-choon; YOON, Seok-keun; KIM, Nam-kyun; KIM, Seung-ae; KU, Jong-seok; KWON, Hyuck-joo; LEE, Kyung-joo; KIM, Bong-ok Patent: WO2013/73874 A1, 2013 ;