chloro-dimethyl-[tris(trimethylsilyl)methyl]silane

[bis[chloro(dimethyl)silyl]-trimethylsilylmethyl]-trimethylsilane

Tetrakis-(chlor-dimethyl-silyl)-methan

trimethyl-[tris[chloro(dimethyl)silyl]methyl]silane

bromo-dimethyl-[tris(trimethylsilyl)methyl]silane