ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; AHN, Hee-choon; YOON, Seok-keun; KIM, Hee-sook; YANG, Soo-jin; LEE, Kyung-joo; KIM, Nam-kyun; CHO, Young-jun; KWON, Hyuck-joo; KIM, Bong-ok Patent: WO2012/141499 A1, 2012 ; Location in patent: Page/Page column 16 ;