ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; KIM, Chi-sik; KIM, Hee-sook; LEE, Hyo-jung; KIM, Hye-mi; MOON, Doo-hyeon; HWANG, Soo-jin; LEE, Seon-woo; YANG, Soo-jin; LEE, Su-hyun; LEE, Kyung-joo; SHIN, Hyo-nim; PARK, Kyoung-jin; CHO, Young-jun; KWON, Hyuck-jun; KIM, Bong-ok Patent: WO2013/12298 A1, 2013 ;