ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; KIM, Hyun; JUNG, So-Young; KIM, Chi-Sik; PARK, Kyoung-Jin; PARK, So-Mi; LEE, Kyung-Joo; KWON, Hyuck-Joo; KIM, Bong-Ok Patent: WO2014/3440 A1, 2014 ; Location in patent: Paragraph 161; 162; 163; 164 ;