参考文献

ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; KIM, Hee-sook; NA, Hong-yoep; KU, Jong-seok; KWON, Hyuck-joo; LEE, Kyung-joo; KIM, Bong-ok Patent: WO2013/32278 A1, 2013 ; Location in patent: Paragraph 96; 97 ;