参考文献

ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; SHIN, Hyo Nim; KIM, Chi Sik; LEE, Su Hyun; NA, Hong Yoep; YOON, Seok-Keun; YANG, Soo Jin; LEE, Soo Yong; CHO, Young Jun; PARK, Kyoung-Jin; LEE, Kyung Joo; KIM, Bong Ok Patent: WO2012/67425 A1, 2012 ; Location in patent: Page/Page column 39-40 ;