参考文献

ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; HWANG, Soo-Jin; AHN, Hee Choon; LEE, Mi Ae; YOON, Seok Keun; KIM, Bong Ok Patent: WO2012/30145 A1, 2012 ; Location in patent: Page/Page column 15-16 ;