参考文献

ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; AHN, Hee-Choon; LEE, Hyo-Jung; LEE, Mi-Ja; YANG, Soo-Jin; KIM, Chi-Sik; LEE, Su-Hyun; KIM, Hee-Sook; SHIN, Hyo-Nim; PARK, Kyoung-Jin; LEE, Kyung-Joo; KWON, Hyuck-Joo; KIM, Bong-Ok Patent: WO2013/122402 A1, 2013 ; Location in patent: Paragraph 153; 156; 157 ;