ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.; AHN, Hee-choon; YOON, Seok-keun; MOON, Doo-hyeon; KIM, Hee-sook; LEE, Su-hyun; SHIN, Hyo-nim; LEE, Kyung-joo; PARK, Kyoung-jin; KIM, Nam-kyun; CHO, Young-jun; KWON, Hyuck-joo; KIM, Bong-ok Patent: WO2012/121561 A1, 2012 ;