Tungsten tetrafluoride is an inorganic compound with the formula WF4. This little studied solid has been invoked, together with tungsten pentafluoride, as an intermediate in the chemical vapor deposition of tungsten films using tungsten hexafluoride.

CAS：13766-47-7
中文别名：
英文别名：
分子式：F4W
分子量：259.834
精确质量：259.945
Psa：0.0
Logp：-11.984